✦ LIBER ✦
Impact of recess-etching-assisting resist-openings on the shapes of gate grooves for short gate length InAlAs/InGaAs heterojunction FET's
✍ Scribed by Xu, D.; Enoki, T.; Ishii, Y.
- Book ID
- 114537697
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 580 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0018-9383
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