✦ LIBER ✦
Impact of inside spacer process on fully self-aligned 250GHz SiGe:C HBTs reliability performances: a-Si vs. nitride
✍ Scribed by Diop, M.; Revil, N.; Marin, M.; Monsieur, F.; Chevalier, P.; Ghibaudo, G.
- Book ID
- 108210769
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 309 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0026-2714
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