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Impact of GeOx interfacial layer thickness on Al2O3/Ge MOS interface properties

✍ Scribed by R. Zhang; T. Iwasaki; N. Taoka; M. Takenaka; S. Takagi


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
518 KB
Volume
88
Category
Article
ISSN
0167-9317

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