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Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus-doped polysilicon emitter contacts
✍ Scribed by Rahim, A.I.A.; Marsh, C.D.; Ashburn, P.; Booker, G.R.
- Book ID
- 114538898
- Publisher
- IEEE
- Year
- 2001
- Tongue
- English
- Weight
- 158 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0018-9383
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