✦ LIBER ✦
Impact of cooling condition on the crystal structure and surface quality of preferredc-axis-oriented AlN films for SAW devices
✍ Scribed by Geng-yu Zhang; Bao-he Yang; Jian Zhao; Cui-ping Li; Ming-ji Li
- Publisher
- Tianjin University of Technology
- Year
- 2011
- Tongue
- English
- Weight
- 344 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1673-1905
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