Impact of ambient atmosphere on as-implanted amorphous insulating layers

✍ Scribed by B. Schmidt; D. Grambole; F. Herrmann

• Book ID: 114165738
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 166 KB
• Volume: 191
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)00597-9