✦ LIBER ✦
Immersion diffractometry for determining nanoscale grating pitch
✍ Scribed by Lu, Sheng-Hua; Tseng, Li-Cheng; Kao, Ching-Fen; Pan, Shang-Peng; Chang, Liang-Chih
- Book ID
- 115406616
- Publisher
- Optical Society of America
- Year
- 2006
- Tongue
- English
- Weight
- 97 KB
- Volume
- 14
- Category
- Article
- ISSN
- 1094-4087
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