## Abstract A scanning thermal microscope with a Wollaston probe was used to investigate the spatial distribution and temporal variation of temperature in interconnect structures subjected to thermal cycling. The probe, utilized in passive temperature sensing mode, was calibrated from 20Β°C to 200Β°C
Imaging of thermal properties and topography by combined scanning thermal and scanning tunneling microscopy
β Scribed by E. Oesterschulze; M. Stopka
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 510 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0167-9317
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