Illuminating nonlinear dependence of film deposition rate in a CVD reactor on operating conditions

✍ Scribed by N. Cheimarios; E.D. Koronaki; A.G. Boudouvis

• Book ID: 113526368
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 589 KB
• Volume: 181-182
• Category: Article
• ISSN: 1385-8947
• DOI: 10.1016/j.cej.2011.11.008