IIIB-8 titanium disilicide contact resistivity and its impact on 1-µm CMOS circuit performance

✍ Scribed by Scott, D.B.; Chapman, R.A.; Wei, C.C.; Mahant-Shetti, S.; Haken, R.A.; Holloway, T.C.

• Book ID: 114595776
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 313 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22787