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IIb-8 micromechanical light modulator array fabricated on silicon

✍ Scribed by Petersen, K.E.

Book ID: 114592537
Publisher: IEEE
Year: 1977
Tongue: English
Weight: 136 KB
Volume: 24
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1977.18931

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