IIB-6 lateral solid phase epitaxy in partially doped Si amorphous layers onto silicon dioxide

✍ Scribed by Ishiwara, H.; Furukawa, S.; Tanaka, M.; Ohta, K.

• Book ID: 114595758
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 315 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22769