IIB-5 sidewall parasitic suppression in trench-isolated submicrometer CMOS

✍ Scribed by Foster, D.J.; Roberts, M.C.; Bolbot, P.H.; Medhurst, P.L.

• Book ID: 114596170
• Publisher: IEEE
• Year: 1987
• Tongue: English
• Weight: 159 KB
• Volume: 34
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1987.23287