✦ LIBER ✦
IIB-2 fabrication of fully self-aligned 3-D CMOS structures by high dose nitrogen ion implantation
✍ Scribed by Kenyon, P.
- Book ID
- 114595755
- Publisher
- IEEE
- Year
- 1986
- Tongue
- English
- Weight
- 168 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0018-9383
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