IIA-4 A self-aligned gate process for IC's based on modulation-doped (Al, Ga)As/GaAs FET's

✍ Scribed by Cirillo, N.C., Jr.; Abrokwah, J.K.; Shur, M.S.

• Book ID: 114594958
• Publisher: IEEE
• Year: 1984
• Tongue: English
• Weight: 168 KB
• Volume: 31
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1984.21829