IIA-10 submicron-length tungsten gate self-aligned GaAs MESFET (late paper)

✍ Scribed by Matsumoto, K.; Hashizume, N.; Atoda, N.; Nishimura, K.; Tomizawa, K.; Endo, T.; Yamazaki, M.; Kurosu, T.; Iida, M.

• Book ID: 114594225
• Publisher: IEEE
• Year: 1982
• Tongue: English
• Weight: 105 KB
• Volume: 29
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1982.20946