Principles of Plasma Discharges and Mate
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Lieberman, Michael A.; Lichtenberg, Allan J.
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Article
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2005
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John Wiley & Sons, Inc.
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English
β 748 KB
A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becom