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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control

✍ Scribed by Ikehashi, T.; Ogawa, E.; Yamazaki, H.; Ohguro, T.

Book ID: 121082718
Publisher: IEEE
Year: 2007
Weight: 856 KB
Category: Article
ISBN-13: 9781424408412
DOI: 10.1109/SENSOR.2007.4300093

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