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[IEEE The 9th Russian-Korean International Symposium on Science and Technology. KORUS 2005 - Novosibirsk, Russia (26 June-2 July 2005)] Proceedings. The 9th Russian-Korean International Symposium on Science and Technology, 2005. KORUS 2005. - Extended magnetron sputter deposition system with a cylindrical cathode

✍ Scribed by Sochugov, N.S.; Soloviev, A.A.; Zakharov, A.N.; Oskomov, K.V.; Chun, H.G.; Kim, D.I.; You, Y.Z.; Lee, J.H.; Cha, B.C.; Choi, B.K.

Book ID: 121823409
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 623 KB
Category: Article
ISBN-13: 9780780389434
DOI: 10.1109/KORUS.2005.1507776

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