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[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure

✍ Scribed by Razzak, M.A.; Takamura, S.; Uesugi, Y.; Ohno, N.

Book ID: 125498414
Publisher: IEEE
Year: 2006
Weight: 128 KB
Category: Article
ISBN-13: 9781424401253
DOI: 10.1109/PLASMA.2006.1706960

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