[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - Single-Wafer vs. Batch Wet Surface Preparation in BEOL: a Comparison of Polymer Cleans using Inorganic Chemicals in Flash Memory Production

✍ Scribed by Couteau, T.; Dawson, G.; Halladay, J.; Archer, L.

• Book ID: 125507331
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 911 KB
• Category: Article
• ISBN-13: 9781424402540
• DOI: 10.1109/ASMC.2006.1638771