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[IEEE SMC '03 2003 IEEE International Conference on Systems, Man and Cybernetics - Washington, DC, USA (5-8 Oct. 2003)] SMC'03 Conference Proceedings. 2003 IEEE International Conference on Systems, Man and Cybernetics. Conference Theme - System Security and Assurance (Cat. No.03CH37483) - Semiconductor manufacturing process visualization

✍ Scribed by McNames, J.; Abercrombie, D.; Turner, D.; Shannon, T.

Book ID: 126757405
Publisher: IEEE
Year: 2003
Weight: 331 KB
Volume: 5
Category: Article
ISBN-13: 9780780379527
DOI: 10.1109/ICSMC.2003.1245765

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