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[IEEE Sixth IEEE International Symposium on Applications of Ferroelectrics - (1986.06.8-1986.06.11)] Sixth IEEE International Symposium on Applications of Ferroelectrics - RF Reactively Sputtered Aluminum Nitride Thin Films

✍ Scribed by Kumar, N.; Pourrezaei, K.; Singh, B.; DeMaria, R.J.

Book ID: 126641700
Publisher: IEEE
Year: 1986
Weight: 190 KB
Category: Article
DOI: 10.1109/ISAF.1986.201101

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