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[IEEE PLANS 2004. Position Location and Navigation Symposium - Monterey, CA, USA (26-29 April 2004)] PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556) - Dynamic behavior modeling of MEMS parallel plate capacitors

✍ Scribed by Saucedo-Flores, E.; Ruelas, R.; Flores, M.; Ying Cai, ; Jung-chih Chiao,

Book ID: 121292014
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 282 KB
Category: Article
ISBN-13: 9780780384163
DOI: 10.1109/PLANS.2004.1308968

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