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[IEEE LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society - San Diego, CA, USA (12-13 Nov. 2001)] LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) - High power F/sub 2/ lasers for microlithography

✍ Scribed by Mizoguchi, H.; Fujimoto, J.; Nakaike, T.; Suzuki, T.; Nagai, S.; Yabu, T.; Soumagne, G.; Chiba, T.; Wakabayashi, O.; Nohdomi, R.; Ariga, T.; Watanabe, H.; Kumazaki, T.; Kitatochi, N.; Sasano, K.; Ueno, Y.; Nishisaka, T.; Hotta, K.; Nakao, K.

Book ID: 126766790
Publisher: IEEE
Year: 2001
Weight: 258 KB
Volume: 2
Category: Article
ISBN-13: 9780780371057
DOI: 10.1109/LEOS.2001.968953

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