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[IEEE ISAF 2002. 13th IEEE International Symposium on Applications of Ferroelectrics - Nara, Japan (28 May-1 June 2002)] Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. - Depth profile of fixed charge in epitaxial oxide films on silicon substrate for MFIS structure

✍ Scribed by Yamada, T.; Wakiya, N.; Shinozaki, K.; Mizutani, N.

Book ID: 121330605
Publisher: IEEE
Year: 2002
Weight: 365 KB
Category: Article
ISBN-13: 9780780374140
DOI: 10.1109/ISAF.2002.1195894

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