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[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Design Of A Silicon Microphone With Differential Read-out Of A Sealed Double Parallel-plate Capacitor

✍ Scribed by Bay, J.; Hansen, O.; Bouwstra, S.

Book ID: 126745179
Publisher: IEEE
Year: 1995
Weight: 441 KB
Volume: 2
Category: Article
DOI: 10.1109/SENSOR.1995.721928

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