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[IEEE International Conference on Plasma Sciences (ICOPS) - Vancouver, BC, Canada (1993.06.7-1993.06.9)] International Conference on Plasma Sciences (ICOPS) - Paradoxical electron temperature spatial distribution in a low pressure RF discharge

✍ Scribed by Godyak, V.A.; Piejak, R.B.

Book ID: 121381664
Publisher: IEEE
Year: 1993
Weight: 126 KB
Category: Article
ISBN-13: 9780780313606
DOI: 10.1109/PLASMA.1993.593463

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