[IEEE International Conference on Microelectronics - Nis, Serbia (12-14 Sept. 1995)] Proceedings of International Conference on Microelectronics - Effect of deposition conditions on stability of sputtered oxide in MOS structures

✍ Scribed by Jelenkovic, E.V.; Tong, K.Y.

• Book ID: 126994102
• Publisher: IEEE
• Year: 1995
• Weight: 442 KB
• Volume: 1
• Category: Article
• ISBN-13: 9780780327863
• DOI: 10.1109/icmel.1995.500830