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[IEEE International Conference on Indium Phosphide and Related Materials - Santa Barbara, CA, USA (12-16 May 2003)] International Conference onIndium Phosphide and Related Materials, 2003. - First real-time true wafer temperature and growth rate measurements in a closed-coupled showerhead MOVPE reactor during growth of InGa(AsP)

✍ Scribed by Haberland, K.; Mullins, J.T.; Schenk, T.; Trepk, T.; Considine, L.; Pakes, A.; Taylor, A.; Zettler, J.-T.

Book ID: 126670696
Publisher: IEEE
Year: 2003
Weight: 231 KB
Category: Article
ISBN-13: 9780780377042
DOI: 10.1109/ICIPRM.2003.1205308

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