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[IEEE Instruments (ICEMI) - Beijing, China (2009.08.16-2009.08.19)] 2009 9th International Conference on Electronic Measurement & Instruments - Homodyne laser interferometric displacement measuring system with nanometer accuracy

✍ Scribed by Huang, Qiangxian; Liu, Xiaowei; Sun, Lala

Book ID: 111859620
Publisher: IEEE
Year: 2009
Weight: 153 KB
Volume: 0
Category: Article
ISBN: 1424438632
DOI: 10.1109/icemi.2009.5274280

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