✦ LIBER ✦
[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Munich, Germany (31 March-1 April 2003)] Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - Dopant redistribution and loss during ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/ formation
✍ Scribed by Xu, Y.Q.; Zhao, J.; Lu, J.P.; Miles, D.; Loewecke, J.; Tiner, P.; Xia Dong, ; Novak, S.W.
- Book ID
- 121655297
- Publisher
- IEEE
- Year
- 2003
- Weight
- 225 KB
- Category
- Article
- ISBN-13
- 9780780376731
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