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[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA (October 18-19, 1993)] Proceedings. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cost Analysis for a Multiple Product / Multiple Process Factory: Application of SEMATECH's Future Factory Design Methodology

✍ Scribed by Neacy, E.; Abt, N.; Brown, S.; McDavid, M.; Robinson, J.; Srodes, S.; Stanley, T.

Book ID: 126758059
Publisher: IEEE
Year: 1993
Weight: 948 KB
Category: Article
DOI: 10.1109/ASMC.1993.682516

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