𝔖 Bobbio Scriptorium

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[IEEE IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - Cambridge, MA, USA (12-14 Nov. 1996)] IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - Optical characterization of TiN thin films

✍ Scribed by McGahan, W.A.; Spady, B.R.; Iacoponi, J.A.; Williams, J.D.

Book ID: 126706541
Publisher: IEEE
Year: 1996
Weight: 408 KB
Category: Article
ISBN-13: 9780780333710
DOI: 10.1109/ASMC.1996.558081

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