✦ LIBER ✦
[IEEE IEEE Ultrasonics Symposium, 2005. - Rotterdam, The Netherlands (18-21 Sept. 2005)] IEEE Ultrasonics Symposium, 2005. - Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films
✍ Scribed by Takeuchi, M.; Yamada, H.; Kawamura, H.; Yoshino, Y.; Makino, T.; Arai, S.
- Book ID
- 121732950
- Publisher
- IEEE
- Year
- 2005
- Weight
- 208 KB
- Volume
- 3
- Category
- Article
- ISBN-13
- 9780780393820
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