[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - A method to evade microloading effect in deep reactive ion etching for anodically bonded glass-silicon structures

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Deep reactive ion etching of Pyrex glass

✍ Li, X.; Abe, T.; Esashi, M. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 472 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Spiked biopotential electrodes

✍ Griss, P.; Enoksson, P.; Tolvanen-Laakso, H.; Merilainen, P.; Ollmar, S.; Stemme 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 608 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Ultrasonic micromixer for microfluidic systems

✍ Yang, Z.; Goto, H.; Matsumoto, M.; Maeda, R. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 958 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Novel acoustic-wave micromixer

✍ Vivek, V.; Eun Sok Kim, 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 500 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Micromachined rubber O-ring micro-fluidic couplers

✍ Tze-Jung Yao, ; Sangwook Lee, ; Weileun Fang, ; Yu-Chong Tai, 📂 Article 📅 2000 🏛 IEEE ⚖ 329 KB

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Microfabrication technology for polycaprolactone, a biodegradable polymer

✍ Armani, D.K.; Cheng Liu, 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 617 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.

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