[IEEE IEEE SENSORS 2002 - Orlando, FL, USA (12-14 June 2002)] Proceedings of IEEE Sensors - Combined effect of the membrane flatness defect and real dimension gauges on the sensitivity of a silicon piezoresistive pressure sensor

✍ Scribed by Dibi, Z.; Boukabache, A.; Pons, P.

• Book ID: 118201408
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 393 KB
• Volume: 2
• Category: Article
• ISBN-13: 9780780374546
• DOI: 10.1109/icsens.2002.1037245