✦ LIBER ✦

[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Simulation of two-dimensional etch profile of silicon during orientation-dependent anisotropic etching

✍ Scribed by Koide, A.; Sato, K.; Tanaka, S.

No coin nor oath required. For personal study only.

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