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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Properties of piezoelectric thin films for micromechanical devices and systems

โœ Scribed by Tjhen, W.; Tamagawa, T.; Ye, C.-P.; Hsueh, C.-C.; Schiller, P.; Polla, D.L.


Book ID
120970011
Publisher
IEEE
Year
1991
Tongue
English
Weight
393 KB
Category
Article
ISBN-13
9780879426415

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