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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Post-packaging tuning of microresonators by pulsed laser deposition

✍ Scribed by Chiao, M.; Lin, L.

Book ID: 118128770
Publisher: IEEE
Year: 2003
Weight: 386 KB
Volume: 2
Category: Article
ISBN-13: 9780780377318
DOI: 10.1109/sensor.2003.1217141

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