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[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Microwave Plasma Torch Abatement of NF3 and SF6

✍ Scribed by Hong, Yong C.; Uhm, Han S.; Chun, Byung J.; Lee, Sun K.; Hwang, Sang K.

Book ID: 121479013
Publisher: IEEE
Year: 2005
Weight: 892 KB
Category: Article
ISBN-13: 9780780393004
DOI: 10.1109/PLASMA.2005.359458

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