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[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Hollow Cathode Glow Discharge for Plasma Ion Implantation

✍ Scribed by Q.Yang, S.; Jiang, H. F.; Cui, J. T.; Tian, X. B.; Fu, Ricky K. Y.; Chu, Paul K.

Book ID: 111864583
Publisher: IEEE
Year: 2005
Weight: 963 KB
Volume: 0
Category: Article
ISBN-13: 9780780393004
DOI: 10.1109/plasma.2005.359139

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