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[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Modeling and simulation of a large area plasma source

✍ Scribed by Lee, J.K.; Lieberman, M.A.; Meng, L.; Chung, T.H.; Gopinath, V.P.; Glukhoy, Y.; Popov, G.; Shin, Y.K.; Wu, Y.

Book ID: 121332685
Publisher: IEEE
Year: 1996
Weight: 120 KB
Category: Article
ISBN-13: 9780780333222
DOI: 10.1109/PLASMA.1996.550707

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