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[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Modeling and diagnostics of a microwave plasma resonant cavity reactor used for diamond film deposition

✍ Scribed by Grotjohn, T.A.; Welter, M.; Mossbrucker, J.

Book ID: 118039858
Publisher: IEEE
Year: 1996
Weight: 230 KB
Volume: 0
Category: Article
ISBN-13: 9780780333222
DOI: 10.1109/plasma.1996.550639

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