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[IEEE IEEE Conference on Nanotechnology - San Francisco, CA, USA (12-14 Aug. 2003)] 2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003. - The mechanical properties of thin polymer film for nanoimprinting lithography by nanoindentation

✍ Scribed by Lee, H.J.; Hur, S.; Han, S.W.; Kim, J.H.; Oh, C.-S.; Ko, S.G.

No coin nor oath required. For personal study only.

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