✦ LIBER ✦

[IEEE IEEE Conference on Nanotechnology - San Francisco, CA, USA (12-14 Aug. 2003)] 2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003. - Characterization of nano-meter scale roughness of CVD silicon and silicon dioxide films for 3-D device integration

✍ Scribed by Ilhan, H.T.; Nasrullah, J.; Linscott, I.; Tyler, G.L.

No coin nor oath required. For personal study only.

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