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[IEEE IEEE 29th International Conference on Plasma Sciences - Banff, Alta., Canada (26-30 May 2002)] IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) - Time-resolved investigation of pulsed-DC magnetron reactive plasma

✍ Scribed by Belkind, A.; Becker, K.; Freilish, A.; Zhao, Z.

Book ID: 118053256
Publisher: IEEE
Year: 2002
Weight: 54 KB
Volume: 0
Category: Article
ISBN-13: 9780780374072
DOI: 10.1109/plasma.2002.1030548

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