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[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Systematic calibration for transient enhanced diffusion of indium and its application to 0.15-μm logic devices

✍ Scribed by Jun-Ha Lee, ; Seung-Woo Lee, ; Jeong-Taek Kong, ; Young-Wug Kim,

Book ID: 120564129
Publisher: IEEE
Year: 1999
Weight: 287 KB
Edition: 1999
Category: Article
ISBN-13: 9780780357273
DOI: 10.1109/ICVC.1999.820820

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