[IEEE ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings - Bangi, Malaysia (24-26 Nov. 1998)] ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187) - The influence of junction formation process variables on diffusion sheet resistance using statistical design of experiment methodology

✍ Scribed by Hashim, U.; Shaari, A.H.; Ahmad, I.; Shaari, S.; Majlis, B.Y.

• Book ID: 111949426
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 528 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780349711
• DOI: 10.1109/smelec.1998.781177