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[IEEE ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - Penang, Malaysia (26-28 Nov. 1996)] ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - A photoconductivity and Raman scattering analysis of boron-doped a-SiC:H films deposited using the electron cyclotron resonance plasma CVD method

✍ Scribed by Yoon, S.F.; Ji, R.; Ahn, J.; Milne, W.I.

Book ID: 126594858
Publisher: IEEE
Year: 1996
Weight: 476 KB
Category: Article
ISBN-13: 9780780333888
DOI: 10.1109/SMELEC.1996.616482

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